Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection

✍ Scribed by Ya-Chi Cheng; Chi-Jia Tong; Ming-Tzer Lin

• Publisher: Springer-Verlag
• Year: 2011
• Tongue: English
• Weight: 657 KB
• Volume: 17
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-010-1202-x