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About the deconvolution of XPS profiles

✍ Scribed by H. Edel; N. Gurker


Publisher
Elsevier Science
Year
1974
Tongue
English
Weight
429 KB
Volume
5
Category
Article
ISSN
0368-2048

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In this paper, the problem of the deconvolution of SIMS depth proÐles is addressed. In particular, the hypotheses that are necessary for the deconvolution to be possible (in the actual state of the art) in the case of the SIMS signal are reviewed. Then, the principle of regularization, which is a ma