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A time-of-flight secondary ion microscope

✍ Scribed by B. Schueler; P. Sander; D.A. Reed


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
565 KB
Volume
41
Category
Article
ISSN
0042-207X

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A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values