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A throttle valve for automatic pressure control in sputtering and reactive sputter etching

✍ Scribed by HW Lehmann; BJ Curtis; R Fehlmann

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 364 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90205-7

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