A throttle valve for automatic pressure control in sputtering and reactive sputter etching : H. W. Lehmann, B. J. Curtis and R. Fehlmann. Vacuum34, 679 (1984)

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 123 KB
• Volume: 25
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(85)90118-0