✦ LIBER ✦

A test object with three certified linewidth dimensions for a scanning electron microscope

✍ Scribed by M. A. Danilova; V. B. Mityukhlyaev; Yu. A. Novikov; Yu. V. Ozerin; A. V. Rakov; P. A. Todua

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Measurement of the dimensions of microsc

✍ I. F. Ermusheva; S. I. Moskvin; V. M. Pudalov; I. V. Sudakevich 📂 Article 📅 1992 🏛 Springer US 🌐 English ⚖ 343 KB

Calibrating a scanning electron microsco

✍ Yu. A. Novikov; A. V. Rakov; I. Yu. Stekolin 📂 Article 📅 1994 🏛 Springer US 🌐 English ⚖ 216 KB

Calibrating a scanning electron microsco

✍ Ch. P. Volk; Yu. A. Novikov; A. V. Rakov; P. A. Todua 📂 Article 📅 2008 🏛 Springer US 🌐 English ⚖ 141 KB

Measurement of linear dimensions of subm

✍ V. A. Danilov; Yu. A. Novikov; A. V. Rakov; I. Yu. Stekolin 📂 Article 📅 1995 🏛 Springer US 🌐 English ⚖ 290 KB

A test object with a line width less tha

✍ M. A. Danilova; V. B. Mityukhlyaev; Yu. A. Novikov; Yu. V. Ozerin; A. V. Rakov; 📂 Article 📅 2008 🏛 Springer US 🌐 English ⚖ 167 KB

The image of a line width test object in

✍ Ch. P. Volk; V. B. Mityukhlyaev; Yu. A. Novikov; A. V. Rakov; P. A. Todua 📂 Article 📅 2009 🏛 Springer US 🌐 English ⚖ 161 KB