Calibrating a scanning electron microscope in two coordinates by the use of one certified dimension
β Scribed by Ch. P. Volk; Yu. A. Novikov; A. V. Rakov; P. A. Todua
- Publisher
- Springer US
- Year
- 2008
- Tongue
- English
- Weight
- 141 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0543-1972
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