A test object with a line width less than 10 nm for scanning electron microscopy

✍ Scribed by M. A. Danilova; V. B. Mityukhlyaev; Yu. A. Novikov; Yu. V. Ozerin; A. V. Rakov; P. A. Todua

• Publisher: Springer US
• Year: 2008
• Tongue: English
• Weight: 167 KB
• Volume: 51
• Category: Article
• ISSN: 0543-1972
• DOI: 10.1007/s11018-008-9135-9