๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

โœ Scribed by S.-J. Cho; I.-S. Bae; H.-D. Jeong; J.-H. Boo

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
510 KB
Volume
254
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

A study on the microstructure and electr
A study on the microstructure and electrical properties of CeO2 thin films for gate dielectric applications
โœ Jung-Ho Yoo; Seok-Woo Nam; Sung-Kwan Kang; Yun-Ha Jeong; Dae-Hong Ko; Ja-Hum Ku; ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 947 KB

We investigated the evolution of microstructures and the electrical properties of CeO thin films deposited by the reactive 2 DC magnetron sputtering method on the (100) silicon substrate upon annealing in the O gas ambient. The CeO thin films 2 2 deposited at 3008C were polycrystalline. After anneal