𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A study on structural, optical, electrical and microstructural properties of thin TiOx films upon thermal oxidation: Effect of substrate temperature and oxidation temperature

✍ Scribed by Monjoy Sreemany; Ankita Bose; Suchitra Sen

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
794 KB
Volume
405
Category
Article
ISSN
0921-4526

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Effect of substrate temperature on the s
Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films
✍ S.V. Jagadeesh Chandra; S. Uthanna; G. Mohan Rao πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 669 KB

dc reactive magnetron sputtering technique was employed for deposition of tantalum oxide films on quartz and silicon substrates by sputtering of pure tantalum target in the presence of oxygen and argon gases under various substrate temperatures in the range 303-973 K. The variation of cathode potent

Effects of substrate temperature on elec
Effects of substrate temperature on electrical and structural properties of copper thin films
✍ Kah-Yoong Chan; Teck-Yong Tou; Bee-San Teo πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 444 KB

This paper addresses the effects of substrate temperature on electrical and structural properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon. Copper films of 80 and 500 nm were deposited from Cu target in argon ambient gas pressure of 3.6 mTorr at different substrate