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A comparative study on microstructure and tribological properties of Si3N4 and TiN thin films produced by IBED method

✍ Scribed by Zhuang Da-Ming; Liu Jia-Jun; Zhu-Bao-Liang; Li Wen-Zhi; Zhang Xu-Shou; Yang Sheng-Rong

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 544 KB
Volume: 21
Category: Article
ISSN: 0272-8842
DOI: 10.1016/0272-8842(95)94470-u

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