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Comparative study of properties of a-Si:H films produced by hot-filament CVD, glow discharge CVD and their hybrid version

✍ Scribed by A.A Kumbhar; S.T Kshirsagar


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
746 KB
Volume
283
Category
Article
ISSN
0040-6090

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