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A study of the initial stages of the oxidation of silicon using 18O2 and RTP

✍ Scribed by J.-J. Ganem; G. Battistig; S. Rigo; I. Trimaille

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
542 KB
Volume
65-66
Category
Article
ISSN
0169-4332

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