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A study of microstructure and nanomechanical properties of silicon incorporated DLC films deposited on silicon substrates

✍ Scribed by Zhao, J.F; Lemoine, P; Liu, Z.H; Quinn, J.P; Maguire, P; McLaughlin, J.A

Book ID
118042324
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
142 KB
Volume
10
Category
Article
ISSN
0925-9635

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