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A study of heterogeneous niobium carbonitride thin films deposited by reactive sputtering

✍ Scribed by André Aubert; Jean Spitz

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 382 KB
Volume: 96
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90243-7

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