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A structural characterization of AlN thin film deposited on a single crystal Al2O3(0 0 0 1) substrate

✍ Scribed by K. H. KIM; C. H. CHANG; Y. M. KOO

Book ID: 110372419
Publisher: Springer
Year: 1997
Tongue: English
Weight: 233 KB
Volume: 16
Category: Article
ISSN: 0261-8028
DOI: 10.1023/a:1018542217877

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