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A spectroscopic study of Na+-bound electrons at Si-SiO2 interfaces

✍ Scribed by H.R. Chang; F. Koch


Publisher
Elsevier Science
Year
1982
Weight
39 KB
Volume
113
Category
Article
ISSN
0167-2584

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Cyanide treatment, which includes the immersion of Si in KCN solutions followed by a rinse, effectively passivates interface states at Si/SiO 2 interfaces by the reaction of CN Γ€ ions with interface states to form Si-CN bonds. X-ray photoelectron spectroscopy (XPS) measurements show that the concent