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A self-consistent fluid simulation of an inductively coupled plasma reactor

✍ Scribed by Bose, D.; Govindan, T.R.; Meyyappan, M.

Book ID: 114558664
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 991 KB
Volume: 27
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.763031

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