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A scanning conduction microscopic method for probing abrasion of insulating thin films

โœ Scribed by J. T. Dickinson; K. H. Siek; K. W. Hipps

Publisher
Springer US
Year
1995
Tongue
English
Weight
937 KB
Volume
1
Category
Article
ISSN
1023-8883

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Using an atomic force microscope (AFM) operating in air, we locally modify thin films of ebeam-deposited Cr and Ti by applying voltage pulses between the AFM tip and the sample, which is positively biased with respect to the tip. The modifications consist in anodization and/or mechanical deformation