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A simple method for depositing thin films on the surface of transmission electron microscope specimens

✍ Scribed by T. Boone

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
1002 KB
Volume
14
Category
Article
ISSN
0304-3991

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✍ Barmak, Katayun ;Rudman, David A. ;Foner, Simon πŸ“‚ Article πŸ“… 1990 πŸ› Wiley (John Wiley & Sons) 🌐 English βš– 607 KB

## Abstract We have developed a technique for preparation of cross‐sectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and N