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Nanolithographic patterning of thin metal films with a scanning probe microscope

✍ Scribed by S. Melinte; B. Nysten; V. Bayot

Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 209 KB
Volume: 24
Category: Article
ISSN: 0749-6036
DOI: 10.1006/spmi.1996.0272

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✦ Synopsis

Using an atomic force microscope (AFM) operating in air, we locally modify thin films of ebeam-deposited Cr and Ti by applying voltage pulses between the AFM tip and the sample, which is positively biased with respect to the tip. The modifications consist in anodization and/or mechanical deformation and reach the metal/substrate interface. Metallic gates can thus be fabricated without pattern transfer.

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