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A novel silicon accelerometer with a surrounding mass structure

✍ Scribed by K. Yamada; K. Higuchi; H. Tanigawa

Book ID: 108028020
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 556 KB
Volume: 21
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)85061-8

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