Realisation of silicon piezoresistive accelerometer with proof mass-edge-aligned-flexures using wet anisotropic etching

✍ Scribed by Ravi Sankar, A.; Grace Jency, J.; Ashwini, J.; Das, S.

• Book ID: 114461788
• Publisher: The Institution of Engineering and Technology
• Year: 2012
• Tongue: English
• Weight: 379 KB
• Volume: 7
• Category: Article
• ISSN: 1750-0443
• DOI: 10.1049/mnl.2011.0717