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A new technique for growing large surface area SnO 2 thin film (RGTO technique)

✍ Scribed by Sberveglieri, G; Faglia, G; Groppelli, S; Nelli, P; Camanzi, A

Book ID
126236988
Publisher
Institute of Physics
Year
1990
Tongue
English
Weight
512 KB
Volume
5
Category
Article
ISSN
0268-1242

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A new technique for the preparation of highly sensitive hydrogen sensors based on SnO2(Bi2O3) thin films
✍ Giorgio Sberveglieri; Silvio Groppelli; Paolo Nelli; Alberto Camanzi πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 456 KB

H, in air can be detected with sensors based on semiconductor oxides. A new technique for growing a hydrogen sensor based on SnO,(Bi,O,) thin films is presented here. The thin films have a thickness of 200-250 nm and the metals are in the atomic ratio Bi/Sn.= (3-S) at.%](97-95) at.%. The two metals