✦ LIBER ✦
A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: the MultiPoly process
✍ Scribed by Jie Yang, ; Kahn, H.; An-Qiang He, ; Phillips, S.M.; Heuer, A.H.
- Book ID
- 121663413
- Publisher
- IEEE
- Year
- 2000
- Tongue
- English
- Weight
- 368 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1057-7157
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