A new preparation method for cross-sectional TEM specimens
β Scribed by Hans-Jaochim Klaar; Fu-Yung Hsu
- Book ID
- 114341030
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 417 KB
- Volume
- 36
- Category
- Article
- ISSN
- 1044-5803
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Laser lift-off (LLO) technology is successfully used to prepare GaN-based TEM cross-sectional specimens. Detailed procedures of the method to prepare the specimens are demonstrated. Large thin areas suitable for TEM analysis were obtained. TEM images of the resulting GaN interface are studied, and t
Cross-sectional transmission electron microscopy (XTEM) is an imaging technique particularly suited to the study of layered structures. For integrated electronic devices it has become a common practice to use XTEM to assess the shape and crystallinity of component layers as well as defect structures