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A new etching chemistry for carbon hard mask structures

✍ Scribed by Kevin A. Pears

Book ID: 108207385
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 574 KB
Volume: 77
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.11.010

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