✦ LIBER ✦
“In situ” hard mask materials: a new methodology for creation of vertical silicon nanopillar and nanowire arrays
✍ Scribed by Ghoshal, Tandra; Senthamaraikannan, Ramsankar; Shaw, Matthew T.; Holmes, Justin D.; Morris, Michael A.
- Book ID
- 118043894
- Publisher
- The Royal Society of Chemistry
- Year
- 2012
- Tongue
- English
- Weight
- 478 KB
- Volume
- 4
- Category
- Article
- ISSN
- 2040-3364
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