This paper presents the results of investigations which have led to the batch fabrication of a new condenser microphone and the subsequent measurement of its characteristics. With an overall siz of 3 x 4 x 0.8 mm3 including an hybrid JFET, the microphone has an integrated back-chamber and is achieve
A new condenser microphone in silicon
โ Scribed by J. Bergqvist; F. Rudolf
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 414 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0924-4247
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