✦ LIBER ✦

A new approach to aspect ratio independent etching

✍ Scribed by V.F. Lukichev

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Aspect-ratio-independent anisotropic sil

✍ O. V. Morozov; I. I. Amirov 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 242 KB

A high aspect ratio design approach to m

✍ Das, M.B. 📂 Article 📅 1985 🏛 IEEE 🌐 English ⚖ 761 KB

A new removable resist for high aspect r

✍ Matthias Schirmer; Doris Perseke; Eva Zena; Daniel Schondelmaier; Ivo Rudolph; B 📂 Article 📅 2006 🏛 Springer-Verlag 🌐 English ⚖ 276 KB

Simulation approach for achieving layout

✍ Harafuji, K.; Ohkuni, M.; Kubota, M.; Nakagawa, H.; Misaka, A. 📂 Article 📅 1999 🏛 IEEE 🌐 English ⚖ 452 KB

Profile control in high aspect ratio con

✍ T.F. Yen; K.J. Chang; K.-F. Chiu 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 315 KB

New development strategies for high aspe

✍ J. Zanghellini; S. Achenbach; A. El-Kholi; J. Mohr; F. J. Pantenburg 📂 Article 📅 1998 🏛 Springer-Verlag 🌐 English ⚖ 160 KB