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Aspect-ratio-independent anisotropic silicon etching in a plasma chemical cyclic process

✍ Scribed by O. V. Morozov; I. I. Amirov

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📜 SIMILAR VOLUMES

Formation of microstructures on silicon

✍ I. I. Amirov; N. V. Alov 📂 Article 📅 2008 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 285 KB

The mechanism of formation of microneedl

✍ I. I. Amirov; A. S. Shumilov 📂 Article 📅 2008 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 303 KB