✦ LIBER ✦
Simulation approach for achieving layout independent polysilicon gate etching
✍ Scribed by Harafuji, K.; Ohkuni, M.; Kubota, M.; Nakagawa, H.; Misaka, A.
- Book ID
- 114537734
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 452 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0018-9383
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