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A new approach for the direct synthesis of nanocomposite thin films by ion-beam processing

โœ Scribed by R Enrique; F Wu; P Bellon

Book ID
108422974
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
857 KB
Volume
150
Category
Article
ISSN
0257-8972

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Application of ion beam analysis to the selective sublimation processing of thin films for gas sensing
โœ A. Vomiero; C. Scian; G. Della Mea; V. Guidi; G. Martinelli; G. Schiffrer; E. Co ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 125 KB

Ion beam analysis was successfully applied to a novel technique, named selective sublimation process (SSP), for deposition of nanostructured gas-sensing films through reactive sputtering. The method consists of the co-deposition of a mixed oxide, one of which has a relatively low sublimation tempera