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A Microwave High-Density Plasma Source for Submicron Silicon IC Technology

✍ Scribed by S. N. Averkin; K. A. Valiev; V. A. Naumov; A. V. Kalinin; A. D. Krivospitskii; A. A. Orlikovskii; A. A. Rylov

Book ID: 110300526
Publisher: Springer
Year: 2001
Tongue: English
Weight: 192 KB
Volume: 30
Category: Article
ISSN: 1063-7397
DOI: 10.1023/a:1011358525116

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