✦ LIBER ✦
Highly robust ultrathin silicon nitride films grown at low-temperature by microwave-excitation high-density plasma for giga scale integration
✍ Scribed by Sekine, K.; Saito, Y.; Hirayama, M.; Ohmi, T.
- Book ID
- 114538205
- Publisher
- IEEE
- Year
- 2000
- Tongue
- English
- Weight
- 168 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0018-9383
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