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A micro cycloid-gear system fabricated by multi-exposure LIGA technique

✍ Scribed by S. J. Chung; H. Hein; T. Hirata; J. Mohr; T. Akashi

Book ID: 106186386
Publisher: Springer-Verlag
Year: 2000
Tongue: English
Weight: 530 KB
Volume: 6
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s005420050185

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