SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Micro-optical and optomechanical systems fabricated by the LIGA technique

✍ Scribed by Mohr, Juergen; Goettert, Jost; Mueller, Andre; Ruther, Patrick; Wengeling, Klaus; Motamedi, M. Edward; Hornbeck, Larry J.; Pister, Kristofer S. J.

• Book ID: 121468023
• Publisher: SPIE
• Year: 1997
• Weight: 431 KB
• Volume: 3008
• Category: Article
• DOI: 10.1117/12.271424