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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic composite-sensors designed and fabricated by a low-cost single-side ‘SiN/poly-Si/Al’ multi-user process-module for versatile sensing-network nodes

✍ Scribed by Ni, Zao; Yang, Chen; Xu, Dehui; Zhou, Hong; Zhou, Wei; Li, Tie; Xiong, Bin; Li, Xinxin

Book ID: 121210509
Publisher: IEEE
Year: 2013
Weight: 958 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474338

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