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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Microassembly of MEMS actuators and sensors via micro-masonry

✍ Scribed by Zhang, Y.; Keum, H.; Kim, S.

Book ID: 121205630
Publisher: IEEE
Year: 2013
Weight: 847 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474233

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