✦ LIBER ✦

A general simulator for VLSI lithography and etching processes: Part I—Application to projection lithography

✍ Scribed by Oldham, W.G.; Nandgaonkar, S.N.; Neureuther, A.R.; O'Toole, M.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A general simulator for VLSI lithography

✍ Oldham, W.G.; Neureuther, A.R.; Chiakang Sung; Reynolds, J.L.; Nandgaonkar, S.N. 📂 Article 📅 1980 🏛 IEEE 🌐 English ⚖ 449 KB

A General Etching Simulator for VLSI Lit

✍ Oldham, W.G.; Neureuther, A.R.; Chiakang Sung; Reynolds, J.L.; Nandgaonkar, S.N. 📂 Article 📅 1980 🏛 IEEE 🌐 English ⚖ 745 KB

A Level Set Approach to a Unified Model

✍ D. Adalsteinsson; J.A. Sethian 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 787 KB