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A deep AlTiC dry etching for fabrication of Burnish and Glide slider head

✍ Scribed by C. Pakpum; P. Limsuwan

Book ID: 119357512
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 370 KB
Volume: 32
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.02.051

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