✦ LIBER ✦
Deep reactive ion etching of silicon and diamond for the fabrication of planar refractive hard X-ray lenses
✍ Scribed by B. Nöhammer; C. David; H. Rothuizen; J. Hoszowska; A. Simionovici
- Book ID
- 114155542
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 787 KB
- Volume
- 67-68
- Category
- Article
- ISSN
- 0167-9317
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