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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A New Method for High-Rate Deep Dry Etching of Silicate Glass with Variable ETCH Profile

✍ Scribed by Bertz, A.; Fendler, R.; Schuberth, R.; Hentsch, W.; Gessner, Th.

Book ID: 118219066
Publisher: IEEE
Year: 2007
Weight: 654 KB
Volume: 0
Category: Article
ISBN-13: 9781424408412
DOI: 10.1109/sensor.2007.4300076

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