✦ LIBER ✦

Grey-tone lithography and dry etching technique for the fabrication of integrated spot size converters

✍ Scribed by S. Ullerich; R. Steingrüber; A. Umbach

Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 922 KB
Volume: 46
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(99)00087-8

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✦ Synopsis

Grey-tone lithography and dry etching technique for the fabrication of integrated spot size converters l q [ I ~ S. Ullerich (1), R. Steingrtiber (2) and A. Umbach (2)