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A comparison of pulsed-laser-deposited and ion-beam-enhanced-deposited AlN thin films for SOI application

✍ Scribed by Chuanling Men; Chenglu Lin

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 286 KB
Volume: 133
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2006.06.016

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