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Synthesis of gradient thin films by ion-beam-enhanced deposition: Liu, X. Zou, J., Zhou, S., Taniguchi, S., Schroer, A. and Wolf, G.K. Mater. Sci. Eng. A July 1991 A139, (1–2), 220–224

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
172 KB
Volume
14
Category
Article
ISSN
0142-1123

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Synthesis of gradient thin films by ion
Synthesis of gradient thin films by ion beam enhanced deposition
✍ Liu Xianghuai; Zhou Jiankun; Zou Shichang; S. Taniguchi; A. Schröer; G.K. Wolf 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 286 KB

Gradient thin films consisting of Si3N 4 were prepared on metals (nickel, steel, AI-C fibre, Ni3AI etc.) by ion-beam-enhanced deposition. The coating deposited on one side of the sample has a high resistance (10 s f2) while that on the other side has a low resistance (1 g2) with a gradual change in