Synthesis of gradient thin films by ion beam enhanced deposition

✍ Scribed by Liu Xianghuai; Zhou Jiankun; Zou Shichang; S. Taniguchi; A. Schröer; G.K. Wolf

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 286 KB
• Volume: 139
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0921-5093(91)90620-3

✦ Synopsis

Gradient thin films consisting of Si3N 4 were prepared on metals (nickel, steel, AI-C fibre, Ni3AI etc.) by ion-beam-enhanced deposition. The coating deposited on one side of the sample has a high resistance (10 s f2) while that on the other side has a low resistance (1 g2) with a gradual change in the interface region. Composition profiles, hardness, adhesion, fatigue life, corrosion resistance and high temperature oxidation behaviour were measured and are discussed.