✦ LIBER ✦

A comparison of kinetic parameters for various CVD-Si3N4 films

✍ Scribed by C.E. Morosanu; E. Segal

Book ID: 103906614
Publisher: Elsevier Science
Year: 1982
Weight: 320 KB
Volume: 7
Category: Article
ISSN: 0390-6035
DOI: 10.1016/0390-6035(82)90058-x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation of Si3N4SiC films by plasma

Preparation of Si3N4SiC films by plasma CVD

✍ Kiichiro Kamata; Yuuji Maeda; Kanji Yasui; Minoru Moriyama 📂 Article 📅 1986 🏛 Elsevier Science ⚖ 50 KB

Microhardness and internal stress of Si3

Microhardness and internal stress of Si3N4-SiC films prepared by plasma CVD

✍ Kiichiro Kamata; Naoyoshi Aizawa; Minoru Moriyama 📂 Article 📅 1986 🏛 Springer 🌐 English ⚖ 215 KB

A hybrid PACVD B4C/CVD Si3N4 coating for

A hybrid PACVD B4C/CVD Si3N4 coating for oxidation protection of composites

✍ H.T. Tsou; W. Kowbel 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 347 KB

Plasma-assisted Chemical Vapor Deposition (PACVD) B,C coating and a hybrid PACVD B,C/CVD Si,N, coating were deposited on a two-dimensional C-C substrate. Oxidation behavior of coated and uncoated C-C composites was studied using a thermogravimetric analyzer (TGA) in both the isothermal and kinetic m

Effects of electron-beam irradiation on

Effects of electron-beam irradiation on the properties of CVD Si3N4 films in MNOS structures

✍ Ma, T. P. 📂 Article 📅 1976 🏛 American Institute of Physics 🌐 English ⚖ 690 KB

Structure of interfaces in a-Si:H/a-Si3N

Structure of interfaces in a-Si:H/a-Si3N4:H multilayers produced by plasma CVD

✍ Y Nakayama; T Takahashi; K Watanabe; T Kawamura 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 184 KB

96/01927 A hybrid PACVD, B4C/CVD Si3N4 c

96/01927 A hybrid PACVD, B4C/CVD Si3N4 coating for oxidation protection of composites

📂 Article 📅 1996 🏛 Elsevier Science ⚖ 174 KB