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Effects of electron-beam irradiation on the properties of CVD Si3N4 films in MNOS structures

✍ Scribed by Ma, T. P.

Book ID: 121476644
Publisher: American Institute of Physics
Year: 1976
Tongue: English
Weight: 690 KB
Volume: 47
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.322777

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