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Preparation of Si3N4SiC films by plasma CVD

✍ Scribed by Kiichiro Kamata; Yuuji Maeda; Kanji Yasui; Minoru Moriyama


Book ID
116117831
Publisher
Elsevier Science
Year
1986
Weight
50 KB
Volume
2
Category
Article
ISSN
0267-3762

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